검색결과 : 1건
No. | Article |
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1 |
SiOxNy thin films with variable refraction index: Microstructural, chemical and mechanical properties Godinho V, de Haro MCJ, Garcia-Lopez J, Goossens V, Terryn H, Delplancke-Ogletree MP, Fernandez A Applied Surface Science, 256(14), 4548, 2010 |