검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
An analysis of the TiN plasmachemical vapor deposition process based on optical emission spectroscopy measurements Peter S, Giegengack H, Richter F, Tabersky R, Konig U Thin Solid Films, 398-399, 343, 2001 |
| 2 |
Optical emission spectroscopy of a PCVD process used for the deposition of TiN on cemented carbides Peter S, Richter F, Tabersky R, Konig U Thin Solid Films, 377-378, 430, 2000 |