검색결과 : 1건
No. | Article |
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1 |
Electrochemical deposition of Copper on patterned Cu/Ta(N)/SiO2 surfaces for super filling of sub-micron features Li WH, Ye JH, Li SFY Journal of Applied Electrochemistry, 31(12), 1395, 2001 |
No. | Article |
---|---|
1 |
Electrochemical deposition of Copper on patterned Cu/Ta(N)/SiO2 surfaces for super filling of sub-micron features Li WH, Ye JH, Li SFY Journal of Applied Electrochemistry, 31(12), 1395, 2001 |