검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Properties and thermal stability of chemically vapor deposited W-rich WSix thin films Wang MT, Lin YC, Chuang MS, Chun MC, Chen LJ, Chen MC Journal of Vacuum Science & Technology B, 17(2), 385, 1999 |
| 2 |
Formation of high conductivity WSix layer and its characterization as a gate electrode Byun JS, Lee BH, Park JS, Sohn DK, Choi SJ, Kim JJ Journal of the Electrochemical Society, 145(9), 3228, 1998 |
| 3 |
Thin-film properties and barrier effectiveness of chemically vapor deposited amorphous WSix film Wang MT, Lin YC, Lee JY, Wang CC, Chen MC Journal of the Electrochemical Society, 145(12), 4206, 1998 |
| 4 |
Conformality and composition of films deposited at low pressures Cale TS Chemical Engineering Communications, 153, 261, 1996 |