검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
A Multiscale Simulator for Low-Pressure Chemical-Vapor-Deposition Gobbert MK, Merchant TP, Borucki LJ, Cale TS Journal of the Electrochemical Society, 144(11), 3945, 1997 |
| 2 |
Mesoscopic Scale Modeling of Microloading During Low-Pressure Chemical-Vapor-Deposition Gobbert MK, Ringhofer CA, Cale TS Journal of the Electrochemical Society, 143(8), 2624, 1996 |