검색결과 : 30건
| No. | Article |
|---|---|
| 1 |
Analytical comparison of atomic layer deposition of oxide films inside trench and hole nanostructures Fadeev AV, Rudenko KV Thin Solid Films, 672, 83, 2019 |
| 2 |
A new high-voltage interconnection shielding method for SOI monolithic ICs Zhang L, Zhu J, Sun WF, Huang XQ, Zhao MN, Chen JJ, Shi LX, Chen J, Ding DS Solid-State Electronics, 133, 25, 2017 |
| 3 |
LNG trench dispersion modeling using computational fluid dynamics Melton TA, Cornwell JB Journal of Loss Prevention in The Process Industries, 23(6), 762, 2010 |
| 4 |
Electrochemical deposition in deep vias Neogi P AIChE Journal, 52(1), 354, 2006 |
| 5 |
LP-CVD silicon-based film formation in submicrometer trenches in industrial equipment: Experiments and simulation Gris H, Caussat B, Cot D, Durand J, Couderc JP Advanced Materials, 14(17), A213, 2002 |
| 6 |
Strain induced by Ti salicidation in sub-quarter-micron CMOS devices, as measured by TEM/CBED Benedetti A, Cullis AG, Armigliato A, Balboni R, Frabboni S, Mastracchio GF, Pavia G Applied Surface Science, 188(1-2), 214, 2002 |
| 7 |
Mask charging and profile evolution during chlorine plasma etching of silicon Bogart KHA, Klemens FP, Malyshev MV, Colonell JI, Donnelly VM, Lee JTC, Lane JM Journal of Vacuum Science & Technology A, 18(1), 197, 2000 |
| 8 |
Chemical reaction engineering in the design of CVD reactors Komiyama H, Shimogaki Y, Egashira Y Chemical Engineering Science, 54(13-14), 1941, 1999 |
| 9 |
Coverage simulation for non-liner surface reaction Kim B, Akiyama Y, Imaishi N KAGAKU KOGAKU RONBUNSHU, 25(3), 466, 1999 |
| 10 |
Direct nano-printing on Al substrate using a SiC mold Pang SW, Tamamura T, Nakao M, Ozawa A, Masuda H Journal of Vacuum Science & Technology B, 16(3), 1145, 1998 |