검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Effects of Water-Vapor and Chlorine on the Epitaxial-Growth of Si1-xGex Films by Chemical-Vapor-Deposition - Thermodynamic Analysis Lee IM, Jansons A, Takoudis CG Journal of Vacuum Science & Technology B, 15(4), 880, 1997 |
| 2 |
Characterization of Si1-xGex Epilayers Grown Using a Commercially Available Ultrahigh-Vacuum Chemical-Vapor-Deposition Reactor Lafontaine H, Houghton DC, Elliot D, Rowell NL, Baribeau JM, Laframboise S, Sproule GI, Rolfe SJ Journal of Vacuum Science & Technology B, 14(3), 1675, 1996 |
| 3 |
Growth of Er-Doped Si Films by Electron-Cyclotron-Resonance Plasma-Enhanced Chemical-Vapor-Deposition Rogers JL, Varhue WJ, Adams E, Lavoie MA, Frenette RO Journal of Vacuum Science & Technology A, 12(5), 2762, 1994 |