화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Electronic structure of beta-Ta films from X-ray photoelectron spectroscopy and first-principles calculations
Magnuson M, Greczynski G, Eriksson F, Hultman L, Hogberg H
Applied Surface Science, 470, 607, 2019
2 The mechanical properties and resistivity of Au/NiCr/Ta multi-layered films on Si-(111) substrate
Tang W, Xu KW, Lu J
Thin Solid Films, 520(2), 824, 2011
3 통계적 실험 방법에 의한 Ta 박막의 증착 특성 연구
서유석, 박대규, 정철모, 김상범, 손평근, 이승진, 김한민, 양홍선, 박진원
Korean Journal of Materials Research, 11(6), 492, 2001
4 Micro/nanomechanical and tribological studies of bulk and thin-film materials used in magnetic recording heads
Li XD, Bhushan B
Thin Solid Films, 398-399, 313, 2001
5 Tantalum Metallization Using an Electron-Cyclotron-Resonance Plasma Source Coupled with Divided Microwaves
Nishimura H, Ono T, Oda M, Matsuo S
Journal of Vacuum Science & Technology A, 15(3), 707, 1997