검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Detailed investigation of the surface mechanisms and their interplay with transport phenomena in alumina atomic layer deposition from TMA and water Gakis GP, Vergnes H, Scheid E, Vahlas C, Boudouvis AG, Caussat B Chemical Engineering Science, 195, 399, 2019 |
| 2 |
Expression of the Si etch rate in a CF4 plasma with four internal process variables Cho BO, Hwang SW, Kim IW, Moon SH Journal of the Electrochemical Society, 146(1), 350, 1999 |
| 3 |
Electrochemical impedance spectroscopic study of dimensionally stable anode corrosion Alves VA, da Silva LA, Boodts JFC Journal of Applied Electrochemistry, 28(9), 899, 1998 |