검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Poly(ethyleneimine) as a Passivating Agent for Ta Chemical Mechanical Planarization Sharma PP, Suni I, Brands M, Li YZ Electrochemical and Solid State Letters, 13(12), H416, 2010 |
| 2 |
Strain and electrical characterization of metal-oxide-semiconductor field-effect transistor fabricated on mechanically and thermally transferred silicon on insulator films Lu F, Bickford J, Novotny C, Yu PKL, Lau SS, Henttinen K, Suni T, Suni I Journal of Vacuum Science & Technology B, 22(6), 2691, 2004 |
| 3 |
Effects of plasma activation on hydrophilic bonding of Si and SiO2 Suni T, Henttinen K, Suni I, Makinen J Journal of the Electrochemical Society, 149(6), G348, 2002 |
| 4 |
Chemical stability of Ta diffusion barrier between Cu and Si Laurila T, Zeng K, Kivilahti JK, Molarius J, Suni I Thin Solid Films, 373(1-2), 64, 2000 |