검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etching mechanisms of HfO2, SiO2, and poly-Si substrates in BCl3 plasmas Sungauer E, Pargon E, Mellhaoui X, Ramos R, Cunge G, Vallier L, Joubert O, Lill T Journal of Vacuum Science & Technology B, 25(5), 1640, 2007 |
| No. | Article |
|---|---|
| 1 |
Etching mechanisms of HfO2, SiO2, and poly-Si substrates in BCl3 plasmas Sungauer E, Pargon E, Mellhaoui X, Ramos R, Cunge G, Vallier L, Joubert O, Lill T Journal of Vacuum Science & Technology B, 25(5), 1640, 2007 |