화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 Effect on plasma and etch-rate uniformity of controlled phase shift between rf voltages applied to powered electrodes in a triode capacitively coupled plasma reactor
Sung DY, Jeong SM, Park YM, Volynets VN, Ushakov AG, Kim GH
Journal of Vacuum Science & Technology A, 27(1), 13, 2009
2 High resolution electron energy loss spectroscopy study of Fomblin Z-tetraol thin films
Sung DY, Gellman AJ, Gui J, Ma XD
Journal of Vacuum Science & Technology A, 23(2), 316, 2005
3 The texture of 1050 Al sheet produced by equal channel angular pressing
Akramov S, Lee MG, Kim I, Sung DY, Park BH
Materials Science Forum, 475-479, 417, 2005
4 The texture and property of diffusion barrier of TiN thin films
Sung DY, Kim I, Lee MG, Yang BY, Yang JM, Ko JK
Materials Science Forum, 475-479, 1865, 2005
5 R-value and texture change of AA 1050 Al alloy sheet by equal channel angular pressing
Akramov S, Lee MG, Kim I, Sung DY, Park BH, Kim I
Materials Science Forum, 495-497, 803, 2005
6 The texture effect on diffusion barrier property of TiN films between copper and Si wafer
Sung DY, Kim I, Lee MG, Park NJ, Yang B, Yang JM, Ko JK
Materials Science Forum, 495-497, 1371, 2005
7 Texture of electrodeposited Ni films
Kim IS, Sung DY, Park BH, Lee MG
Materials Science Forum, 449-4, 565, 2004
8 Relationships between textures and surface roughness, frictional behavior, erosion and corrosion properties of TiN films
Kim HD, Kim I, Sung DY, Lee MG, Dost S, King HW
Materials Science Forum, 449-4, 781, 2004