검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Electrochemical investigation of the roles of oxyanions in chemical-mechanical planarization of tantalum and tantalum nitride Sulyma CM, Pettit CM, Surisetty CVVS, Babu SV, Roy D Journal of Applied Electrochemistry, 41(5), 561, 2011 |
| 2 |
Electrochemical characterization of surface complexes formed on Cu and Ta in succinic acid based solutions used for chemical mechanical planarization Sulyma CM, Roy D Applied Surface Science, 256(8), 2583, 2010 |