화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Electric vehicles and natural disaster policy implications
Adderly SA, Manukian D, Sullivan TD, Son M
Energy Policy, 112, 437, 2018
2 Electromigration in AlCu lines: comparison of Dual Damascene and metal reactive ion etching
Filippi RG, Gribelyuk MA, Joseph T, Kane T, Sullivan TD, Clevenger LA, Costrini G, Gambino J, Iggulden RC, Kiewra EW, Ning XJ, Ravikumar R, Schnabel RF, Stojakovic G, Weber SJ, Gignac LM, Hu CK, Rath DL, Rodbell KP
Thin Solid Films, 388(1-2), 303, 2001
3 Influence of underlying interlevel dielectric films on extrusion formation in aluminum interconnects
Chen F, Li BZ, Sullivan TD, Gonzalez CL, Muzzy CD, Lee HK, Levy MD, Dashiell MW, Kolodzey J
Journal of Vacuum Science & Technology B, 18(6), 2826, 2000