검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etching of GaAs/AlGaAs Rib Wave-Guide Structures Using BCl3/Cl-2/N-2/Ar Electron-Cyclotron-Resonance Constantine C, Shul RJ, Sullivan CT, Snipes MB, Mcclellan GB, Hafich M, Fuller CT, Mileham JR, Pearton SJ Journal of Vacuum Science & Technology B, 13(5), 2025, 1995 |