화학공학소재연구정보센터
검색결과 : 12건
No. Article
1 Correlation between texture and mechanical stress durability of thin aluminum films
Nussl R, Jewula T, Ruile W, Sulima T, Hansch W
Thin Solid Films, 556, 376, 2014
2 Growth of highly textured aluminum films on LiTaO3 with optimized titanium intermediate layers
Nussl R, Senft C, Beckmeier D, Jewula T, Ruile W, Sulima T, Hansch W, Eisele I
Thin Solid Films, 519(22), 8154, 2011
3 Growth and modification of thin a-Si : H/a-Ge : H bi-layers to sacrificial c-SiGe alloys through ArF-Excimer laser assisted processing
Chiussi S, Gontad F, Rodriguez R, Serra C, Serra J, Leon B, Sulima T, Hollt L, Eisele I
Applied Surface Science, 254(19), 6030, 2008
4 Epitaxy - A way to novel field effect devices
Sulima T, Abelein U, Eisele I
Thin Solid Films, 517(1), 365, 2008
5 The role of atomic hydrogen in pre-epitaxial silicon substrate cleaning
Assmuth A, Stimpel-Lindner T, Senftleben O, Bayerstadler A, Sulima T, Baumgartner H, Eisele I
Applied Surface Science, 253(20), 8389, 2007
6 Doping profile dependence of the vertical impact ionization MOSFET's (I-MOS) performance
Abelein U, Assmuth A, Iskra P, Schindler M, Sulima T, Eisele I
Solid-State Electronics, 51(10), 1405, 2007
7 Annealing and deposition effects of the chemical composition of silicon-rich nitride
Andersen KN, Svendsen WE, Stimpel-Lindner T, Sulima T, Baumgartner H
Applied Surface Science, 243(1-4), 401, 2005
8 Enhancement of device performance in vertical sub-100 nm MOS devices due to local channel doping
Fink C, Anil KG, Geiger H, Hansch W, Kaesen F, Schulze J, Sulima T, Eisele I
Solid-State Electronics, 46(3), 387, 2002
9 Dopant diffusion during rapid thermal oxidation
Stadler A, Sulima T, Schulze J, Fink C, Kottantharayil A, Hansch W, Baumgartner H, Eisele I, Lerch W
Solid-State Electronics, 44(5), 831, 2000
10 Vertical MOS-gated pin-diodes: MOS-gated tunneling transistors in Si(100) and Si(111)
Schulze J, Fink C, Sulima T, Eisele I, Hansch W
Thin Solid Films, 380(1-2), 154, 2000