검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of crystal quality by crystal originated particle delineation and the impact on the silicon wafer surface Graf D, Suhren M, Lambert U, Schmolke R, Ehlert A, von Ammon W, Wagner P Journal of the Electrochemical Society, 145(1), 275, 1998 |
| 2 |
Crystal Defects in Highly Boron-Doped Silicon Suhren M, Graf D, Lambert U, Wagner P Journal of the Electrochemical Society, 144(11), 4041, 1997 |