검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Extraction of negative ions from pulsed electronegative inductively coupled plasmas having a radio-frequency substrate bias Subramonium P, Kushner MJ Journal of Vacuum Science & Technology A, 22(3), 534, 2004 |
| 2 |
Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. I. Ar pulsed plasmas Subramonium P, Kushner MJ Journal of Vacuum Science & Technology A, 20(2), 313, 2002 |
| 3 |
Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. II. Ar/Cl-2 pulsed plasmas Subramonium P, Kushner MJ Journal of Vacuum Science & Technology A, 20(2), 325, 2002 |