검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Damage Investigation in AlGaAs and InGaP Exposed to High Ion Density Ar and SF6 Plasmas Lee JW, Lee KN, Stradtmann RR, Abernathy CR, Pearton SJ, Hobson WS, Ren F Journal of Vacuum Science & Technology A, 15(3), 890, 1997 |
| 2 |
Ar Plasma-Induced Damage in AlGaAs Stradtmann RR, Lee JW, Abenathy CR, Pearton SJ, Hobson WS Journal of the Electrochemical Society, 143(9), L219, 1996 |