검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Photoelectrochemical undercut etching for fabrication of GaN microelectromechanical systems Stonas AR, MacDonald NC, Turner KL, DenBaars SP, Hu EL Journal of Vacuum Science & Technology B, 19(6), 2838, 2001 |
| No. | Article |
|---|---|
| 1 |
Photoelectrochemical undercut etching for fabrication of GaN microelectromechanical systems Stonas AR, MacDonald NC, Turner KL, DenBaars SP, Hu EL Journal of Vacuum Science & Technology B, 19(6), 2838, 2001 |