화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Fe-N-x/C assisted chemical mechanical polishing for improving the removal rate of sapphire
Xu L, Zou CL, Shi XL, Pan GS, Luo GH, Zhou Y
Applied Surface Science, 343, 115, 2015
2 Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0 0 0 1)
Shi XL, Pan GS, Zhou Y, Gu ZH, Gong H, Zou CL
Applied Surface Science, 307, 414, 2014
3 Extended study of the atomic step-terrace structure on hexagonal SiC (0001) by chemical-mechanical planarization
Shi XL, Pan GS, Zhou Y, Zou CL, Gong H
Applied Surface Science, 284, 195, 2013
4 Effects of plasma treatment on evolution of surface step-terrace structure of critically cleaned c-plane sapphire substrates: An AFM study
Zhang D, Gan Y
Applied Surface Science, 285, 211, 2013
5 Precipitate-free epitaxy of YBa2Cu3O7-delta by atomic control of step arrays on vicinal SrTiO3 (100) substrates
Nie JC, Koyanagi M, Shoji A
Applied Surface Science, 172(3-4), 207, 2001