검색결과 : 5건
No. | Article |
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1 |
Fe-N-x/C assisted chemical mechanical polishing for improving the removal rate of sapphire Xu L, Zou CL, Shi XL, Pan GS, Luo GH, Zhou Y Applied Surface Science, 343, 115, 2015 |
2 |
Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0 0 0 1) Shi XL, Pan GS, Zhou Y, Gu ZH, Gong H, Zou CL Applied Surface Science, 307, 414, 2014 |
3 |
Extended study of the atomic step-terrace structure on hexagonal SiC (0001) by chemical-mechanical planarization Shi XL, Pan GS, Zhou Y, Zou CL, Gong H Applied Surface Science, 284, 195, 2013 |
4 |
Effects of plasma treatment on evolution of surface step-terrace structure of critically cleaned c-plane sapphire substrates: An AFM study Zhang D, Gan Y Applied Surface Science, 285, 211, 2013 |
5 |
Precipitate-free epitaxy of YBa2Cu3O7-delta by atomic control of step arrays on vicinal SrTiO3 (100) substrates Nie JC, Koyanagi M, Shoji A Applied Surface Science, 172(3-4), 207, 2001 |