검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Observer-based temperature control of an LED heated silicon wafer Kleindienst M, Reichhartinger M, Horn M, Staudegger F Journal of Process Control, 70, 96, 2018 |
| 2 |
Analyses and Modeling of a Wet-Chemical-Etch Process on Rotating Silicon Wafers with an Impinging Etchant Jet Staudegger F, Hofbaur MW, Kruwinus HJ Journal of the Electrochemical Society, 156(5), H340, 2009 |