화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Compositionally tunable optical properties of hafnium titanium oxide films deposited by atomic layer deposition without intermediate surface hydroxylation
Lebedev MS, Kruchinin VN, Lebedeva MI, Spesivtsev EV
Thin Solid Films, 642, 103, 2017
2 Features of oxide layer formation in high-aspect slot structures by means of MOCVD
Shevtsov YV, Kuchumov BM, Kruchinin VN, Spesivtsev EV, Golovnev IF, Igumenov IK
Journal of Crystal Growth, 414, 135, 2015
3 In situ ellipsometry for control of Hg1-xCdxTe nanolayer structures and inhomogeneous layers during MBE growth
Shvets VA, Rykhlitski SV, Spesivtsev EV, Aulchenko NA, Mikhailov NN, Dvoretsky SA, Sidorov YG, Smirnov RN
Thin Solid Films, 455-56, 688, 2004