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| No. | Article |
|---|---|
| 1 |
The kinetics of low-temperature spatial atomic layer deposition of aluminum oxide Poodt P, Illiberi A, Roozeboom F Thin Solid Films, 532, 22, 2013 |
| No. | Article |
|---|---|
| 1 |
The kinetics of low-temperature spatial atomic layer deposition of aluminum oxide Poodt P, Illiberi A, Roozeboom F Thin Solid Films, 532, 22, 2013 |