검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Morphology Study of the Thermal-Oxidation of Rough Silicon Surfaces Liu Q, Spanos L, Zhao C, Irene EA Journal of Vacuum Science & Technology A, 13(4), 1977, 1995 |
| 2 |
A Study of Silicon Epitaxial-Growth on Silicon Substrates Exposed to Ar Electron-Cyclotron-Resonance Plasmas Buaud PP, Hu YZ, Spanos L, Irene EA, Christensen KN, Venables D, Maher DM Journal of Vacuum Science & Technology B, 13(4), 1442, 1995 |
| 3 |
In-Situ Electron-Cyclotron-Resonance Plasma Surface Cleaning of Silicon Hu YZ, Buaud PP, Spanos L, Wang YQ, Li M, Irene EA Journal of Vacuum Science & Technology A, 12(4), 1315, 1994 |
| 4 |
Investigation of Roughened Silicon Surfaces Using Fractal Analysis .1. 2-Dimensional Variation Method Spanos L, Irene EA Journal of Vacuum Science & Technology A, 12(5), 2646, 1994 |
| 5 |
Investigation of Roughened Silicon Surfaces Using Fractal Analysis .2. Chemical Etching, Rapid Thermal Chemical-Vapor-Deposition, and Thermal-Oxidation Spanos L, Liu Q, Irene EA, Zettler T, Hornung B, Wortman JJ Journal of Vacuum Science & Technology A, 12(5), 2653, 1994 |