화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Nitridation and oxynitridation of Si to control interfacial reaction with HfO2
Katarnreddy R, Inman R, Jursich G, Soulet A, Takoudis C
Thin Solid Films, 516(23), 8498, 2008
2 ALD and characterization of aluminum oxide deposited on Si(100) using tris(diethylamino) aluminum and water vapor (vol 153, pg C701, 2006)
Katamreddy R, Inman R, Jursich G, Soulet A, Takoudis C
Journal of the Electrochemical Society, 154(4), S5, 2007
3 Post deposition annealing of aluminum oxide deposited by atomic layer deposition using tris(diethylamino)aluminum and water vapor on Si(100)
Katamreddy R, Inman R, Jursich G, Soulet A, Nicholls A, Takoudis C
Thin Solid Films, 515(17), 6931, 2007
4 ALD and characterization of aluminum oxide deposited on Si (100) using tris(diethylamino) aluminum and water vapor
Katamreddy R, Inman R, Jursich G, Soulet A, Takoudis C
Journal of the Electrochemical Society, 153(10), C701, 2006
5 Microstructure and plastic anisotropy in rolled Al-Mg alloys.
Eardley ES, Soulet A, Court SA, Humphreys FJ, Bate PS
Materials Science Forum, 426-4, 363, 2003