검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Real time scatterometry for profile control during resist trimming process El Kodadi M, Soulan S, Besacier M, Schiavone P Journal of Vacuum Science & Technology B, 27(6), 3232, 2009 |
| 2 |
Surface characterization of imprinted resist above glass transition temperature Leveder T, Landis S, Davoust L, Soulan S, Tortai JH, Chaix N Journal of Vacuum Science & Technology B, 25(6), 2365, 2007 |