검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Selective Etching of Phosphosilicate Gloss Th Low-Pressure Vapor HF Watanabe H, Ohnishi S, Honma I, Kitajima H, Ono H, Wilhelm RJ, Sophie AJ Journal of the Electrochemical Society, 142(1), 237, 1995 |
| 2 |
Influence of Water Adsorption/Desorption Processes on the Selectivity of Vapor HF Etching Watanabe H, Kitajima H, Honma I, Ona H, Wilhelm RJ, Sophie AJ Journal of the Electrochemical Society, 142(4), 1332, 1995 |