검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
In situ trench etching and releasing technique of high aspect ratio beams using magnetically enhanced reactive ion etching Kok KW, Yoo WJ, Sooriakumar K Journal of Vacuum Science & Technology B, 20(1), 154, 2002 |
| 2 |
Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems Kok KW, Yoo WJ, Sooriakumar K, Pan JS, Lee EY Journal of Vacuum Science & Technology B, 20(5), 1878, 2002 |