검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Deposition Mechanism and Electrical-Properties of Low-Pressure Chemically Vapor-Deposited W as a Gate Electrode Kim K, Sone JH, Kim SO, Park JS, Kim HJ Journal of Vacuum Science & Technology A, 14(3), 919, 1996 |
| 2 |
Formation of Low-Pressure Chemically Vapor-Deposited W-Thin-Film on Silicon Dioxide for Gate Electrode Application Sone JH, Kim SO, Kim KJ, Kim HS, Kim HJ Thin Solid Films, 253(1-2), 377, 1994 |
| 3 |
Electrical-Properties of the P(+)-Gate Electrode of an A-Si/Poly-Si Double-Layer Kim SO, Kim KJ, Kim HS, Kang SB, Sone JH, Byun JS, Kim HJ Thin Solid Films, 253(1-2), 413, 1994 |