검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Hydrogen pressure dependence of trench corner rounding during hydrogen annealing Kuribayashi H, Shimizu R, Sodoh K, Iwasaki H Journal of Vacuum Science & Technology A, 22(4), 1406, 2004 |
| No. | Article |
|---|---|
| 1 |
Hydrogen pressure dependence of trench corner rounding during hydrogen annealing Kuribayashi H, Shimizu R, Sodoh K, Iwasaki H Journal of Vacuum Science & Technology A, 22(4), 1406, 2004 |