검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Filter design methodology for defect detection in wafer inspection Socha RJ, Neureuther AR Journal of Vacuum Science & Technology B, 15(6), 2718, 1997 |
| 2 |
Propagation Effects of Partial Coherence in Optical Lithography Socha RJ, Neureuther AR Journal of Vacuum Science & Technology B, 14(6), 3724, 1996 |