검색결과 : 1건
No. | Article |
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1 |
Layer-by-layer deposition of zirconium oxide films from aqueous solutions for friction reduction in silicon-based micro electromechanical system devices Liu JF, Nistorica C, Gory I, Skidmore G, Mantiziba FM, Gnade BE Thin Solid Films, 492(1-2), 6, 2005 |