검색결과 : 1건
No. | Article |
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1 |
Initial reactions in chemical vapor deposition of Ta2O5 from TaCl5 and H2O. An ab initio study Siodmiak M, Frenking G, Korkin A Journal of Physical Chemistry A, 104(6), 1186, 2000 |
No. | Article |
---|---|
1 |
Initial reactions in chemical vapor deposition of Ta2O5 from TaCl5 and H2O. An ab initio study Siodmiak M, Frenking G, Korkin A Journal of Physical Chemistry A, 104(6), 1186, 2000 |