화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Formation of graphene on amorphous SiC film by surface-confined heating with electron beam irradiation
Jin H, Lee JY, Kim J, Jung S, Mo K, Park K
Current Applied Physics, 18(3), 335, 2018
2 Hard a-SiC:H films formed by remote hydrogen microwave plasma chemical vapor deposition using a novel single-source precursor
Wrobel AM, Walkiewicz-Pietrzykowska A, Uznanski P, Glebocki B
Thin Solid Films, 520(24), 7100, 2012
3 Kinetics of halide chemical vapor deposition of silicon carbide film
Wang R, Ma RH
Journal of Crystal Growth, 308(1), 189, 2007
4 SiC(100) ordered film growth by C-60 decomposition on Si(100) surfaces
Moras P, Mahne N, Ferrari L, Pesci A, Capozi M, Aversa L, Jha SN, Verucchi R, Iannotta S, Pedio M
Applied Surface Science, 184(1-4), 50, 2001
5 Synthesis of SiC on Si(111) at moderate temperatures by supersonic C-60 beams
Aversa L, Verucchi R, Ciullo G, Ferrari L, Moras P, Pedio M, Pesci A, Iannotta S
Applied Surface Science, 184(1-4), 350, 2001