검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of incident ion beam angle on dry etching of silica sub-micron particles deposited on Si substrates Portal S, Rubio-Roy M, Corbella C, Vallve MA, Ignes-Mullol J, Bertran E Thin Solid Films, 518(5), 1543, 2009 |
| No. | Article |
|---|---|
| 1 |
Influence of incident ion beam angle on dry etching of silica sub-micron particles deposited on Si substrates Portal S, Rubio-Roy M, Corbella C, Vallve MA, Ignes-Mullol J, Bertran E Thin Solid Films, 518(5), 1543, 2009 |