검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ion energy control at substrates during plasma etching of patterned structures Silapunt R, Wendt AE, Kirmse KHR Journal of Vacuum Science & Technology B, 25(6), 1882, 2007 |
| 2 |
Ion bombardment energy control for selective fluorocarbon plasma etching of organosilicate glass Silapunt R, Wendt AE, Kirmse K, Losey LP Journal of Vacuum Science & Technology B, 22(2), 826, 2004 |