검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Demonstration of deep (80 mu m) RIE etching of SIC for MEMS and MMIC applications Sheridan DC, Casady JB, Ellis EC, Siergiej RR, Cressler JD, Strong RM, Urban WM, Valek WF, Seiler CF, Buhay H Materials Science Forum, 338-3, 1053, 2000 |
| 2 |
Simulation and fabrication of high-voltage 4H-SiC diodes with multiple floating guard ring termination Sheridan DC, Niu G, Merrett JN, Cressler JD, Ellis C, Tin CC, Siergiej RR Materials Science Forum, 338-3, 1339, 2000 |
| 3 |
Surface roughness of reactive ion etched 4H-SiC in SF6/O-2 and CHF3/H-2/O-2 plasmas Casady JB, Mani SS, Siergiej RR, Urban W, Balakrishna V, Sanger PA, Brandt CD Journal of the Electrochemical Society, 145(4), L58, 1998 |