검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Secondary ion mass spectrometry characterization of anomalous behavior for low dose ion implanted phosphorus in silicon Penley C, Stevie FA, Griffis DP, Siebel S, Kulig L, Lee J Journal of Vacuum Science & Technology B, 28(3), 511, 2010 |