검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Surface roughness of SiO2 from a remote microwave plasma enhanced chemical vapor deposition process Rack MJ, Vasileska D, Ferry DK, Sidorov M Journal of Vacuum Science & Technology B, 16(4), 2165, 1998 |
| No. | Article |
|---|---|
| 1 |
Surface roughness of SiO2 from a remote microwave plasma enhanced chemical vapor deposition process Rack MJ, Vasileska D, Ferry DK, Sidorov M Journal of Vacuum Science & Technology B, 16(4), 2165, 1998 |