검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Advanced chemical model for analysis of Cz and DS Si-crystal growth Vorob'ev AN, Sid'ko AP, Kalaev VV Journal of Crystal Growth, 386, 226, 2014 |
| 2 |
Kinetics of SiGe chemical vapor deposition from chloride precursors Lovtsus AA, Segal AS, Sid'ko AP, Talalaev RA, Storck P, Kadinski L Journal of Crystal Growth, 287(2), 446, 2006 |
| 3 |
Quasi-thermodynamic model of SiGe epitaxial growth Segal AS, Karpov SY, Sid'ko AP, Makarov YN Journal of Crystal Growth, 225(2-4), 268, 2001 |