검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reliability degradation of thin HfO(2)/SiO(2) gate stacks by remote RF hydrogen and deuterium plasma treatment Efthymiou E, Bernardini S, Zhang JF, Volkos SN, Hamilton B, Peaker AR Thin Solid Films, 517(1), 207, 2008 |
| No. | Article |
|---|---|
| 1 |
Reliability degradation of thin HfO(2)/SiO(2) gate stacks by remote RF hydrogen and deuterium plasma treatment Efthymiou E, Bernardini S, Zhang JF, Volkos SN, Hamilton B, Peaker AR Thin Solid Films, 517(1), 207, 2008 |