검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Equilibrium Concentrations of SiHCl3 and SiCl4 in SiCl4-H-2 System for Hydrogenatlon of SiCl4 to SiHCl Zhou YM, Fand WB, Li YG, Nie ZF, Ma WH, Dai YN, Hou YQ Journal of Chemical Engineering of Japan, 50(12), 871, 2017 |
| 2 |
Recycling of SiCl4 in the manufacture of granular polysilicon in a fluidized bed reactor Wang CJ, Wang TF, Li PL, Wang ZW Chemical Engineering Journal, 220, 81, 2013 |
| 3 |
Thermodynamic Study on SiCl4 Hydrogenation System in Siemens Process Hou YQ, Xie G, Tao DP, Yu XH, Li RX, Song DM Journal of Chemical Engineering of Japan, 44(4), 213, 2011 |
| 4 |
Simulation of aerosol dynamics and transport in chemically reacting particulate matter laden flows. Part II: Application to CVD reactors Kommu S, Khomami B, Biswas P Chemical Engineering Science, 59(2), 359, 2004 |