검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
From amorphous to microcrystalline silicon deposition in SiF4-H-2-He plasmas: in situ control by optical emission spectroscopy Cicala G, Capezzuto P, Bruno G Thin Solid Films, 383(1-2), 203, 2001 |
| No. | Article |
|---|---|
| 1 |
From amorphous to microcrystalline silicon deposition in SiF4-H-2-He plasmas: in situ control by optical emission spectroscopy Cicala G, Capezzuto P, Bruno G Thin Solid Films, 383(1-2), 203, 2001 |