검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The formation of SiCN film on Si substrate by constant-source diffusion He XL, Chai XZ, Yu L, Han P, Fan S, Huang L, Tao T, Li ZY, Xie ZL, Xiu XQ, Chen P, Liu B, Hua XM, Zhao H, Zhang R, Zheng YD Thin Solid Films, 642, 124, 2017 |