검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Passivation of SiO2/4H-SiC interface defects via electron cyclotron resonance hydrogen-nitrogen mixed plasma pretreatment for SiC surface combined with post-oxidation annealing Liu BB, Qin FW, Wang DJ Applied Surface Science, 364, 769, 2016 |
| 2 |
Enhanced TiC/SiC Ohmic contacts by ECR hydrogen plasma pretreatment and low-temperature post-annealing Liu BB, Qin FW, Wang DJ Applied Surface Science, 355, 59, 2015 |