검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Heteroepitaxial 3C-SiC on Si (100) with flow-modulated carbonization process conditions Li Y, Zhao ZF, Yu L, Wang Y, Yin ZJ, Li ZH, Han P Journal of Crystal Growth, 506, 114, 2019 |
| 2 |
Heteroepitaxial growth of thick 3C-SiC (110) films by Laser CVD Sun QY, Yang MJ, Li J, Xu QF, Tu R, Li QZ, Zhang S, Zhang LM, Goto T, Ohmori H, Kosinova M Journal of the American Ceramic Society, 102(8), 4480, 2019 |
| 3 |
Pressure dependence of morphology and phase composition of SiC films deposited by microwave plasma chemical vapor deposition on cemented carbide substrates Yu SW, Fan PW, Tang WZ, Li XJ, Hu HL, Hei HJ, Zhang SK, Lu FX Thin Solid Films, 520(2), 828, 2011 |
| 4 |
The structure and photoluminescence properties of Cr-doped SiC films Jin CG, Wu XM, Zhuge LJ Applied Surface Science, 255(9), 4711, 2009 |
| 5 |
Delaminated zeolite-catalysed synthesis of high-molecular weight polycarbosilane as a low shrinkage SiC precursor Nguyen CT, Kim DP, Hong SB Journal of Polymer Science Part A: Polymer Chemistry, 46(2), 725, 2008 |
| 6 |
Initial study on the structure and photoluminescence properties of SiC films doped with Al Sha ZD, Wu XM, Zhuge LJ Applied Surface Science, 252(12), 4340, 2006 |
| 7 |
Growth of high quality silicon carbide films by bias enhanced low-pressure HFCVD using methane George VC, Das A, Roy M, Dua AK, Raj P, Zahn DRT Applied Surface Science, 212, 287, 2003 |
| 8 |
Nanosized beta-SiC films prepared by a Cat-CVD with negative bias at low substrate temperature Wang B, Zhao Q, Li JC, Wang BB, Song XM, Yang XD, Yan H, Wang M Applied Surface Science, 217(1-4), 314, 2003 |
| 9 |
Compositional and structural studies of DC magnetron sputtered SiC films on Si(111) Lei YM, Yu YH, Ren CX, Zou SC, Chen DH, Wong SP, Wilson IH Thin Solid Films, 365(1), 53, 2000 |
| 10 |
Sensor Fabrication Using Thin Film-on-Silicon Approaches Muller G, Deimel PP, Hellmich W, Wagner C Thin Solid Films, 296(1-2), 157, 1997 |