검색결과 : 1건
No. | Article |
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1 |
Growth, microstructure and electrical properties of sputter-deposited hafnium oxide (HfO2) thin films grown using a HfO2 ceramic target Aguirre B, Vemuri RS, Zubia D, Engelhard MH, Shutthananadan V, Bharathi KK, Ramana CV Applied Surface Science, 257(6), 2197, 2011 |