검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Dielectric and barrier properties of spin-on organic aromatic low dielectric constant polymers FLARE and SiLK Wu ZC, Shiung ZW, Wu RG, Liu YL, Wu WH, Tsui BY, Chen MC, Chang W, Chou PF, Jang SM, Hu CH, Liang MS Journal of the Electrochemical Society, 148(6), F109, 2001 |
| 2 |
Physical and electrical characteristics of F- and C-doped low dielectric constant chemical vapor deposited oxides Wu ZC, Shiung ZW, Chiang CC, Wu WH, Chen MC, Jeng SM, Chang W, Chou PF, Jang SM, Yu CH, Liang MS Journal of the Electrochemical Society, 148(6), F115, 2001 |
| 3 |
Physical and electrical characteristics of methylsilane- and trimethylsilane-doped low dielectric constant chemical vapor deposited oxides Wu ZC, Shiung ZW, Chiang CC, Wu WH, Chen MC, Jeng SM, Chang W, Chou PF, Jang SM, Yu CH, Liang MS Journal of the Electrochemical Society, 148(6), F127, 2001 |