검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Etch characteristics of HfO2 films on Si substrates Norasetthekul S, Park PY, Baik KH, Lee KP, Shin JH, Jeong BS, Shishodia V, Norton DP, Pearton ST Applied Surface Science, 187(1-2), 75, 2002 |
| 2 |
Dry etch chemistries for TiO2 thin films Norasetthekul S, Park PY, Baik KH, Lee KP, Shin JH, Jeong BS, Shishodia V, Lambers ES, Norton DP, Pearton SJ Applied Surface Science, 185(1-2), 27, 2001 |